Optical Imaging System for Semiconductor Wafer Analysis

• After-sales Service: 1 Year
• Warranty: 1 Year
• Magnification: >1000X
• Type: Video
• Number of Cylinder: Binoculars
• Mobility: Desktop
• Model NO.: LS AFM
• Stereoscopic Effect: Stereoscopic Effect
• Kind of Light Source: Ordinary Light
• Shape: Single-lens
• Usage: Teaching
• Principle: Optics
• Principle of Optics: Polarizing Microscope
• Sample Size: Φ≤90mm,H≤20mm
• Max. Scan Range: X/Y: 20 Um, Z: 2 Um
• Resolution: X/Y:160;0.2 Nm, Z: 0.05nm
• Scan Rate: 0.6Hz~4.34Hz
• Feedback Type: DSP Digital Feedback
• PC Connection: USB2.0
• Windows: Compatible with Windows98/2000/XP/7/8
• Scan Angle: Random
• Sample Movement: 0~20mm
• Data Points: 256×256,512×512
• Transport Package: Carton and Wooden
• Specification: 55 lbs
• Trademark: flyingman
• Origin: China
• HS Code: 9011800090
• Production Capacity: 100pieces/Month

Product Description

Suzhou FlyingMan Precision Instruments Co., Ltd. offers an Advanced Optical Imaging System for Semiconductor Wafer Analysis. This high-resolution microscope provides industry-leading wafer inspection and defect detection capabilities.

Product Description

Features

• The first large-scale industrial atomic force microscope in China to achieve commercial production


• Unlimited sample size and weight capacity, ideal for testing large samples like wafers, ultra large gratings, and optical glass


• Sample stage with strong expandability for multi-instrument combination and in-situ detection


• One-click automatic scanning with programming for multiple test points for fast and automated detection


• Stationary sample scanning with XYZ 3D motion measurement imaging


• Gantry scanning head design, marble base, vacuum adsorption stage


• Integrated mechanical vibration damping and environmental noise shielding solutions for reduced system noise levels


• Intelligent and fast needle insertion method for automatic detection of piezoelectric ceramics


• Scanner nonlinear correction user editor for nano characterization and measurement accuracy better than 98%

Software

1. Two sampling pixel options: 256×256, 512×512


2. Execute scan area move and cut function to select any area of interest on the sample


3. Scan sample in random angles at the beginning


4. Real-time adjustment of the laser spot detection system


5. Choose and set different colors for scanning images in the palette


6. Support linear average and offset calibration in real-time for sample tilt


7. Support scanner sensitivity calibration and electronic controller auto-calibration


8. Support offline analysis and processing of sample images

Company Name: Suzhou FlyingMan Precision Instruments Co., Ltd.

 
 

Product Parameters

Working mode	Contact mode, Tapping mode	Z Lifting table	Stepper motor drive control with a minimum step size of 10nm
Optional mode	Friction force/lateral force, amplitude/phase,magnetic force/electrostatic force	Z Lifting stroke	20mm (optional 25mm)
Force spectrum curve	F-Z force curve, RMS-Z curve	Optical positioning	10X optical objective
XYZ Scanning method	Probe driven XYZ scanning	Camera	5 megapixel digital CMOS
XY Scanning Range	Greater than  100um×100um	Scan rate	0.6Hz~30Hz
Z Scan angle	Greater than 10um	Scan angle	0~360°
Scanning resolution	Horizontal 0.2nm, vertical 0.05nm	Operating environment	Windows 10 operating system
XY Sample Stage	Stepper motor drive control, with a movement accuracy of 1um	Communication interface	USB2.0/3.0
XY Shift motion	200×200mm(Optional 300×300mm)	Instrument structure	Gantry scanning head, marble base
Sample loading platform	Dia 200mm(Optional 300mm)	Damping method	Air floating shock absorption acoustic shielding cover (optional active shock absorption platform)
Sample Weight	≤20Kg

III. Main Technical Parameters

Founded in 2013, Suzhou FlyingMan Precision Instruments Co., Ltd. has been dedicated to producing high-quality instruments for laboratories and factories for the past 9 years.

We offer an atomic force microscope designed for both educational and wafer inspection purposes, providing the best cost ratio in the market.

 

Detailed Photos