Advanced Semiconductor Wafer Scanning Afm System

• Customization: Available
• After-sales Service: 1 Year
• Warranty: 1 Year
• Model NO.: LS AFM
• Magnification: >1000X
• Type: Video
• Number of Cylinder: Binoculars
• Mobility: Desktop
• Stereoscopic Effect: Stereoscopic Effect
• Kind of Light Source: Ordinary Light
• Shape: Single-lens
• Usage: Teaching
• Principle: Optics
• Principle of Optics: Polarizing Microscope
• Sample Size: Φ≤90mm,H≤20mm
• Max. Scan Range: X/Y: 20 Um, Z: 2 Um
• Resolution: X/Y:160;0.2 Nm, Z: 0.05nm
• Scan Rate: 0.6Hz~4.34Hz
• Feedback Type: DSP Digital Feedback
• PC Connection: USB2.0
• Windows: Compatible with Windows98/2000/XP/7/8
• Scan Angle: Random
• Sample Movement: 0~20mm
• Data Points: 256×256,512×512
• Transport Package: Carton and Wooden
• Specification: 55 lbs
• Trademark: flyingman
• Origin: China
• HS Code: 9011800090
• Production Capacity: 100pieces/Month

Product Description

Advanced Semiconductor Wafer Scanning AFM System

Explore nano-scale semiconductor analysis with our high-resolution AFM scanner. Perfect for wafer topography mapping and defect detection.

Product Description

Atomic Force Microscope Features

Features

The first large-scale industrial atomic force microscope in China to achieve commercial production

• The sample size and weight are almost unlimited, making it particularly suitable for testing large samples such as wafers, ultra large gratings, and optical glass


• The sample stage has strong expandability and is very convenient for multi instrument combination to achieve in-situ detection


• One click automatic scanning, capable of programming multiple test points for fast and automated detection


• Keep the sample stationary while scanning the image, and drive the probe to perform XYZ 3D motion measurement imaging


• Gantry scanning head design, marble base, vacuum adsorption stage


• Integrated mechanical vibration damping and environmental noise shielding solutions greatly reduce system noise levels


• Intelligent and fast needle insertion method for automatic detection of piezoelectric ceramics under motor control, protecting probes and samples


• Scanner nonlinear correction user editor, with nano characterization and measurement accuracy better than 98%

Software

1. Two kinds of sampling pixel for choose: 256×256, 512×512


2. Execute scan area move and cut function, choose any interesting area of sample


3. Scan sample in random angle at beginning


4. Adjust the laser spot detection system in real time


5. Choose and set different color of scanning image in palette


6. Support linear average and offset calibration in real time for sample title


7. Support scanner sensitivity calibration and electronic controller auto-calibration


8. Support offline analysis and process of sample image

Company name: Suzhou FlyingMan Precision Instruments Co., Ltd.

 
 

Product Parameters

Working mode	Contact mode, Tapping mode	Z Lifting table	Stepper motor drive control with a minimum step size of 10nm
Optional mode	Friction force/lateral force, amplitude/phase,magnetic force/electrostatic force	Z Lifting stroke	20mm (optional 25mm)
Force spectrum curve	F-Z force curve, RMS-Z curve	Optical positioning	10X optical objective
XYZ Scanning method	Probe driven XYZ scanning	Camera	5 megapixel digital CMOS
XY Scanning Range	Greater than  100um×100um	Scan rate	0.6Hz~30Hz
Z Scan angle	Greater than 10um	Scan angle	0~360°
Scanning resolution	Horizontal 0.2nm, vertical 0.05nm	Operating environment	Windows 10 operating system
XY Sample Stage	Stepper motor drive control, with a movement accuracy of 1um	Communication interface	USB2.0/3.0
XY Shift motion	200×200mm(Optional 300×300mm)	Instrument structure	Gantry scanning head, marble base
Sample loading platform	Dia 200mm(Optional 300mm)	Damping method	Air floating shock absorption acoustic shielding cover (optional active shock absorption platform)
Sample Weight	≤20Kg

Main Technical Parameters

Suzhou FlyingMan Precision Instruments Co., Ltd. (FSM) was established in 2013, specializing in the production of high-quality instruments for laboratories and factories. With a focus on innovation and precision, FSM offers an atomic force microscope designed for both educational purposes and wafer inspection.

The FSM atomic force microscope boasts the best cost ratio in the market, providing exceptional value for users seeking accurate and reliable measurements in their research and manufacturing processes.

 

Detailed Photos