Customization: | Available |
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After-sales Service: | 1 Year |
Warranty: | 1 Year |
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Suzhou FlyingMan Precision Instruments Co., Ltd. offers a cutting-edge Biological Microscope System tailored for the Semiconductor Wafer industry. This advanced microscope system provides high-resolution microscopy for wafer analysis, ensuring precise semiconductor inspection and analysis.
Company name: 'Suzhou FlyingMan Precision Instruments Co., Ltd.'
Working mode | Contact mode, Tapping mode | Z Lifting table | Stepper motor drive control with a minimum step size of 10nm |
Optional mode | Friction force/lateral force, amplitude/phase,magnetic force/electrostatic force | Z Lifting stroke | 20mm (optional 25mm) |
Force spectrum curve | F-Z force curve, RMS-Z curve | Optical positioning | 10X optical objective |
XYZ Scanning method | Probe driven XYZ scanning | Camera | 5 megapixel digital CMOS |
XY Scanning Range | Greater than 100um×100um | Scan rate | 0.6Hz~30Hz |
Z Scan angle | Greater than 10um | Scan angle | 0~360° |
Scanning resolution | Horizontal 0.2nm, vertical 0.05nm | Operating environment | Windows 10 operating system |
XY Sample Stage |
Stepper motor drive control, with a movement accuracy of 1um | Communication interface | USB2.0/3.0 |
XY Shift motion |
200×200mm(Optional 300×300mm) | Instrument structure | Gantry scanning head, marble base |
Sample loading platform | Dia 200mm(Optional 300mm) | Damping method | Air floating shock absorption acoustic shielding cover (optional active shock absorption platform) |
Sample Weight | ≤20Kg |